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A Comparison of CF4, CHF3 and C4F8 + Ar/O2 Inductively Coupled Plasmas for Dry Etching

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Etch Characteristics of Pt Using Cl2/Ar/O2 Gas Mixtures

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Repository at Hanyang University: 차세대 HARC process의 new

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Novel technology of high-aspect-ratio etch utilizing coverage

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High aspect ratio etch yield improvement by a novel polymer

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Damaged silicon contact layer removal using atomic layer etching

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Selective etching of SiN against SiO2 - ScienceDirect

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Molecular dynamics simulation of Si and SiO2 reactive ion etching

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Materials | Free Full-Text | Investigation of SiO2 Etch Characteristics by C6F6/Ar/O2

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Mechanism of Sidewall Necking and Bowing in the Plasma Etching

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